JPS63185227U - - Google Patents
Info
- Publication number
- JPS63185227U JPS63185227U JP7550287U JP7550287U JPS63185227U JP S63185227 U JPS63185227 U JP S63185227U JP 7550287 U JP7550287 U JP 7550287U JP 7550287 U JP7550287 U JP 7550287U JP S63185227 U JPS63185227 U JP S63185227U
- Authority
- JP
- Japan
- Prior art keywords
- container
- jig
- semiconductor substrate
- pure water
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 238000009835 boiling Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000243 solution Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7550287U JPS63185227U (en]) | 1987-05-20 | 1987-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7550287U JPS63185227U (en]) | 1987-05-20 | 1987-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63185227U true JPS63185227U (en]) | 1988-11-29 |
Family
ID=30921703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7550287U Pending JPS63185227U (en]) | 1987-05-20 | 1987-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63185227U (en]) |
-
1987
- 1987-05-20 JP JP7550287U patent/JPS63185227U/ja active Pending